Electrolysis: processes – compositions used therein – and methods – Electrolytic erosion of a workpiece for shape or surface... – Local application of electrolyte
Reexamination Certificate
2006-10-23
2009-10-20
Wilkins, III, Harry D. (Department: 1795)
Electrolysis: processes, compositions used therein, and methods
Electrolytic erosion of a workpiece for shape or surface...
Local application of electrolyte
C205S640000, C204S22400M
Reexamination Certificate
active
07604729
ABSTRACT:
Methods and apparatuses for selectively removing conductive materials from a microelectronic substrate. A method in accordance with an embodiment of the invention includes positioning the microelectronic substrate proximate to and spaced apart from an electrode pair that includes a first electrode and a second electrode spaced apart from the first electrode. An electrolytic liquid can be directed through a first flow passage to an interface region between the microelectronic substrate and the electrode pair. A varying electrical signal can be passed through the electrode pair and the electrolytic liquid to remove conductive material from the microelectronic substrate. The electrolytic liquid can be removed through a second flow passage proximate to the first flow passage and the electrode pair.
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Lee Whonchee
Meikle Scott G.
Moore Scott E.
Micro)n Technology, Inc.
Perkins Coie LLP
Smith Nicholas A.
Wilkins, III Harry D.
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