Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2008-03-25
2008-03-25
Connolly, Patrick (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
C356S521000
Reexamination Certificate
active
11622304
ABSTRACT:
Described is a fringe generator for an interferometric measurement system having improved fringe stability and reproducibility. The fringe generator includes a light source at a characteristic wavelength and a diffractive element to generate a pair of diffracted beams from light received from the light source. The fringe generator also includes a lens to receive the pair of diffracted beams and to image the plane of the diffractive element onto an object to be measured. The generated fringe pattern is substantially independent to a change in the position of the light source relative to the lens and a change in the characteristic wavelength of the light source. A broadband light source can be used and the resulting broadband fringe pattern is substantially independent to a change in the position of the light source relative to the lens and to a change in the spectral distribution of the broadband light source.
REFERENCES:
patent: 4498770 (1985-02-01), Corwin et al.
patent: 5835218 (1998-11-01), Harding
patent: 6541761 (2003-04-01), Holzapfel et al.
patent: 6690474 (2004-02-01), Shirley
patent: 6760113 (2004-07-01), Chen et al.
patent: 6817528 (2004-11-01), Chen
patent: 6950195 (2005-09-01), Endo et al.
patent: 6952270 (2005-10-01), Shirley
patent: 2002/0135773 (2002-09-01), Chen et al.
patent: 2003/0160969 (2003-08-01), Endo et al.
patent: 2004/0105100 (2004-06-01), Shirley
patent: 2006/0012802 (2006-01-01), Shirley
patent: 2006/0044569 (2006-03-01), Kato
patent: 2006/0072122 (2006-04-01), Hu et al.
Connolly Patrick
Dimensional Photonics International, Inc.
Guerin & Rodriguez LLP
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