Methods and apparatus for profiling surfaces of transparent obje

Details Methods and apparatus for profiling surfaces of transparent obje Methods and apparatus for profiling surfaces of transparent obje

1993-11-15

1996-01-30

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

G01B 902

Patent

active

054884772

ABSTRACT:
An optical system for measuring the front and back surface topography of transparent objects with substantially parallel surfaces includes an interferometer, an electronic camera, and digital signal processing means for determining surface height from interference data. The several disclosed methods of the invention permit the mathematical separation of the interference contributions due to the multiple reflections from the two parallel surfaces of the object. These methods involve relatively simple procedures, such as reversing the orientation of the object between two successive interference measurements, followed by mathematical analysis or calculations that may be readily performed by computer. The preferred apparatus includes a tunable laser source that is used to remove undesirable artifacts and improve the quality of the final image.

REFERENCES:
patent: 4201473 (1980-05-01), Domenicali
patent: 4594003 (1986-06-01), Sommargren
patent: 4869593 (1989-09-01), Biegen
patent: 4872755 (1989-10-01), Kuchel
patent: 5033855 (1991-07-01), Matsui
patent: 5146293 (1992-09-01), Mercer et al.
Katsuyuki Okada, et al., Separate measurements of surface shapes and refractive index inhomogeneity of an optical element using tunable-source phase shifting interferometry, Applied Optics, vol. 29, No. 22, 1 Aug. 1990, pp. 3280-3285.

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