Chemistry: electrical and wave energy – Apparatus – Electrolytic
Reexamination Certificate
2005-03-22
2005-03-22
Mayekar, Kishor (Department: 1753)
Chemistry: electrical and wave energy
Apparatus
Electrolytic
C204S297090
Reexamination Certificate
active
06869510
ABSTRACT:
A reactor for plating a metal onto a surface of a workpiece is set forth. The reactor comprises a reactor bowl including an electroplating solution disposed therein and an anode disposed in the reactor bowl in contact with the electroplating solution. A contact assembly is spaced from the anode within the reactor bowl. The contact assembly includes a plurality of contacts disposed to contact a peripheral edge of the surface of the workpiece to provide electroplating power to the surface of the workpiece. The contacts execute a wiping action against the surface of the workpiece as the workpiece is brought into engagement therewith The contact assembly also including a barrier disposed interior of the plurality of contacts. The barrier includes a member disposed to engage the surface of the workpiece to assist in isolating the plurality of contacts from the electroplating solution.
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Chen Lin-Lin
Hanson Kyle M.
Oberlitner Thomas H.
Pedersen John M.
Woodruff Daniel J.
Mayekar Kishor
Semitool Inc.
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