Fluid handling – Processes – With control of flow by a condition or characteristic of a...
Reexamination Certificate
2007-09-25
2007-09-25
Patel, Harshad (Department: 2855)
Fluid handling
Processes
With control of flow by a condition or characteristic of a...
C137S486000, C137S487500, C073S861000
Reexamination Certificate
active
11148053
ABSTRACT:
Performance of mass flow controller may be vulnerable to pressure transients in a flow path to which the controller is coupled for the purpose of controlling the fluid flow. A system and method are provided for reducing or eliminate performance degradations, instabilities, and/or inaccuracies of a mass flow controller caused by changes in the pressure environment. In particular, a method and system are provided for compensating for pressure transients in the pressure environment of a flow path and mass flow controller.
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Lull John Michael
Saggio, Jr. Joseph A.
Wang Chiun
Celerity, Inc.
Lowrie, Lando & Anastasi, LLP.
Patel Harshad
LandOfFree
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