Measuring and testing – Volume or rate of flow
Reexamination Certificate
2006-07-11
2006-07-11
Patel, Harshad (Department: 2855)
Measuring and testing
Volume or rate of flow
C137S488000, C702S050000
Reexamination Certificate
active
07073392
ABSTRACT:
Performance of mass flow controller may be vulnerable to pressure transients in a flow path to which the controller is coupled for the purpose of controlling the fluid flow. A system and method are provided for reducing or eliminate performance degradations, instabilities, and/or inaccuracies of a mass flow controller caused by changes in the pressure environment. In particular, a method and system are provided for compensating for pressure transients in the pressure environment of a flow path and mass flow controller.
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Tison S.A.: “Accurate Flow Measure In Vaccum Processing” Solid State Technology, Cowan Publ. Corp. Washington, US, vol. 39, No. 10, Oct. 1, 1996, pp. 73-74, 78, 80, 83.
Lull John Michael
Saggio, Jr. Joseph A.
Wang Chiun
Celerity, Inc.
Lowrie Lando & Anastasi, LLP
Mack Corey D.
Patel Harshad
LandOfFree
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