Metal fusion bonding – Process – With measuring – testing – indicating – inspecting – or...
Patent
1990-06-22
1991-08-27
Heinrich, Samuel M.
Metal fusion bonding
Process
With measuring, testing, indicating, inspecting, or...
228 447, 228 491, 29833, 29834, H05K 334
Patent
active
050427091
ABSTRACT:
Methods and apparatus are set forth for passively and precisely aligning pairs of objects, in particular, microelectronic components such as semiconductor lasers and fibers, utilizing fiducial marks. Additionally, methods and apparatus are set forth for combining passive and active alignment techniques where high degrees of alignment precision are required. Still further, techniques are described for fixing prealigned objects, independent of how the objects are prealigned, to a mounting surface in a manner that maintains the relative (aligned) position of the objects. Further yet, in order to help minimize manufacturing costs with respect to production of, for example, microelectronic assemblies, batch processing techniques are described which utilize the novel alignment procedures contemplated by the invention.
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Cina Michael F.
Cohen Mitchell S.
Flint Ephraim B.
Grebe Kurt R.
Hall Douglas J.
Heinrich Samuel M.
International Business Machines - Corporation
Morris Daniel P.
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