Methods and apparatus for inspecting an object

Details Methods and apparatus for inspecting an object Methods and apparatus for inspecting an object

2005-10-24

2009-02-17

Lauchman, L. G (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237100, C356S237600

Reexamination Certificate

active

07492450

ABSTRACT:
A method for inspecting an object using a light measurement system that includes a light source and an imaging sensor. The method includes emitting light from the light source, dispersing light emitted from the light source into one of a diffraction pattern and an interference pattern, and imaging the patterned light onto the object using a lens.

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