Measuring and testing – Instrument proving or calibrating – Volume of flow – speed of flow – volume rate of flow – or mass...
Patent
1991-07-25
1993-05-18
Raevis, Robert
Measuring and testing
Instrument proving or calibrating
Volume of flow, speed of flow, volume rate of flow, or mass...
G01P 1508
Patent
active
052110516
ABSTRACT:
Methods and apparatus for improving performance of a sensor having a sensor proof mass elastically suspended at an initial equilibrium position by a suspension force, provide a tunable force opposing that suspension force and preset the proof mass with that tunable force to a second equilibrium position less stable than the initial equilibrium position. The sensor is then operated from that preset second equilibrium position of the proof mass short of instability. The spring constant of the elastic suspension may be continually monitored, and such continually monitored spring constant may be continually adjusted to maintain the sensor at a substantially constant sensitivity during its operation.
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Diederik W. de Bruin et al, Second-Order Effects in Self-Testable Accelerometers, Technical Digest, IEEE Solid-State Sensor and Actuator Workshop, IEEE Catalog 90CH2783-9 (1990), p. 149.
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Burnham et al., "Measuring the Nanomechanical Properties and Surface Force of Materials Using an Atomic Force Microscope", Naval Research Laboratory, Washington, DC, Aug. 1989.
Kaiser William J.
Kenny Thomas W.
Reynolds Joseph K.
Van Zandt Thomas R.
Waltman Steven B.
California Institute of Technology
Raevis Robert
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