Methods and apparatus for improving sensor performance

Measuring and testing – Instrument proving or calibrating – Volume of flow – speed of flow – volume rate of flow – or mass...

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G01P 1508

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052110516

ABSTRACT:
Methods and apparatus for improving performance of a sensor having a sensor proof mass elastically suspended at an initial equilibrium position by a suspension force, provide a tunable force opposing that suspension force and preset the proof mass with that tunable force to a second equilibrium position less stable than the initial equilibrium position. The sensor is then operated from that preset second equilibrium position of the proof mass short of instability. The spring constant of the elastic suspension may be continually monitored, and such continually monitored spring constant may be continually adjusted to maintain the sensor at a substantially constant sensitivity during its operation.

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Widge Henrion et al, Wide Dynamic Range Direct Digital Accelerometer, Technical Digest, IEEE Solid-State Sensor and Actuator Workshop, IEEE Catalog 90CH2783-9 (1990), p. 153.
Diederik W. de Bruin et al, Second-Order Effects in Self-Testable Accelerometers, Technical Digest, IEEE Solid-State Sensor and Actuator Workshop, IEEE Catalog 90CH2783-9 (1990), p. 149.
Kinkel et al., "Automatic Calibration of Transducers", Oct. 1953, Instruments, vol. 26.
Burnham et al., "Measuring the Nanomechanical Properties and Surface Force of Materials Using an Atomic Force Microscope", Naval Research Laboratory, Washington, DC, Aug. 1989.

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