Methods and apparatus for generating plasmas

Details Methods and apparatus for generating plasmas Methods and apparatus for generating plasmas

1980-03-05

1981-08-04

Newsome, John H.

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Integrated circuit, printed circuit, or circuit board

427 451, 427 94, 427 95, C23C 1108

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042822670

ABSTRACT:
An RF-excited radial-flow, cylindrical plasma reactor (10) includes a toroidal waveguide (17) of rectangular cross-section connected to a microwave source (21). One of the reactive species (37) is flowed through the waveguide and pre-ionized, thus, permitting independent control over the activation of both reactive species.

REFERENCES:
patent: 3007072 (1961-10-01), McGinn et al.
patent: 3287243 (1966-11-01), Ligenza
patent: 3370198 (1968-02-01), Rogers et al.
patent: 3866398 (1975-02-01), Vernon et al.
patent: 3916034 (1975-10-01), Tsuchimoto et al.
patent: 4033287 (1977-07-01), Alexander et al.
patent: 4066037 (1978-01-01), Jacob
Shiba Gaki et al. "Symposium of the Electro Chemical Society", Abstract No. 152, pp. 416-418, (1977).

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