Electric heating – Metal heating – By arc
Patent
1989-10-23
1994-11-22
Paschall, Mark H.
Electric heating
Metal heating
By arc
21912141, 21912143, 156345, 20429831, B23K 900
Patent
active
053671392
ABSTRACT:
Contamination levels in plasma processes are reduced during plasma processing, by prevention of formation of particles, by preventing entry of particles externally introduced or by removing particles spontaneously formed from chemical and/or mechanical sources. Some techniques for prevention of formation of particles include interruption of the plasma by pulsing the source of plasma energy periodically, or application of energy to provide mechanical agitation such as mechanical shockwaves, acoustic stress, ultrasonic stress, vibrational stress, thermal stress, and pressure stress. Following a period of applied stress, a tool is pumped out (if a plasma is used, the glow is first discontinued), vented, opened and flaked or particulate material is cleaned from the lower electrode and other surfaces. A burst of filtered air or nitrogen, or a vacuum cleaner is used for removal of deposition debris while the vented tool is open.
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Bennett Reid S.
Ellingboe Albert R.
Gifford George G.
Haller Kurt L.
McKillop John S.
Balconi-Lamica Michael J.
International Business Machines - Corporation
Jones II Graham S.
Paschall Mark H.
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