Optics: measuring and testing – By light interference – Having partially reflecting plates in series
Reexamination Certificate
2006-06-14
2008-08-12
Connolly, Patrick (Department: 2877)
Optics: measuring and testing
By light interference
Having partially reflecting plates in series
C356S454000
Reexamination Certificate
active
07411686
ABSTRACT:
A method and apparatus are disclosed for measuring a characteristic, e.g. spectral bandwidth, of a light beam. The apparatus may comprise an etalon for generating an interference pattern having at least one light cone, an arrangement of detector elements, the arrangement receiving a portion of the light cone and producing a signal indicative of the characteristic; and an auxiliary detector positioned to receive a portion of the light cone and produce a signal indicative of an alignment between the etalon and the linear arrangement.
REFERENCES:
patent: 5161165 (1992-11-01), Zorabedian
patent: 6539046 (2003-03-01), Newman et al.
patent: 6603549 (2003-08-01), Haas et al.
patent: 6713770 (2004-03-01), Sandstrom et al.
patent: 6717965 (2004-04-01), Hopkins et al.
patent: 6750972 (2004-06-01), Sandstrom et al.
patent: 6894785 (2005-05-01), Rao et al.
patent: 6912052 (2005-06-01), Rao et al.
patent: 6952267 (2005-10-01), Rafac
patent: 7009716 (2006-03-01), Kim et al.
patent: 7136169 (2006-11-01), Sandstrom
patent: 2004/0263844 (2004-12-01), Rafac
patent: 2004/0263861 (2004-12-01), Rafac
patent: 2005/0286599 (2005-12-01), Rafac et al.
U.S. Appl. No. 11/091,005, filed Mar. 25, 2005, Newman et al.
U.S. Appl. No. 11/260,929, filed Oct. 27, 2005, Melchior.
Connolly Patrick
Cymer Inc.
Hillman Matthew K.
Skovholt Jonathan
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