Methodology for image fidelity verification

Details Methodology for image fidelity verification Methodology for image fidelity verification

2007-11-19

2010-12-28

Craig, Dwin M (Department: 2123)

Data processing: structural design, modeling, simulation, and em

Simulating electronic device or electrical system

Circuit simulation

C716S030000, C716S030000

Reexamination Certificate

active

07860701

ABSTRACT:
A method for predicting functionality of an integrated circuit segment to be lithographically printed on a wafer. Initially there is provided a two-dimensional design of an integrated circuit, including an integrated circuit segment having critical width, and a two-dimensional printed image of the critical width integrated circuit segment is simulated. The method then includes determining a ratio of perimeters or areas of the designed critical width integrated circuit segment to the simulated printed critical width integrated circuit segment, and predicting functionality of the critical width integrated circuit segment after printing based on the ratio of perimeters or areas.

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