Methodology for a MEMS variable optical attenuator

Details Methodology for a MEMS variable optical attenuator Methodology for a MEMS variable optical attenuator

2005-12-27

2005-12-27

Connelly-Cushwa, Michelle (Department: 2874)

Optical waveguides

Accessories

Attenuator

C385S016000

Reexamination Certificate

active

06980727

ABSTRACT:
An improved cantilever beam optical switch methodology which provides the function of a variable optical attenuator (VOA). A small degree of intentional misalignment of the waveguide will create different levels of optical attenuation. By finely controlling the misalignment of a selected switched position, a single device may be realized that will provide the functions of both switching and attenuating or just attenuation alone. The optical MEMS device utilizes a latching mechanism in association with a thermal drive actuator for aligning a cantilever beam platform. The integration of the switching function and the VOA function reduce the optical loss which is otherwise unavoidable when the inevitable alterative of a separate switch and a separate VOA must necessarily be employed. The resultant improved device can also be applied for correcting the difference in optical intensity created by the manufacturing tolerances inherent in the fabrication of array waveguide gratings.

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Pinyen Lin et al., U.S. Appl. No. 11/010,769, filed simultaneously herewith, titled “Cantilever Beam MEMS Variable Optical Attenuator” (A3046Q-US-NP).
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