Coating processes – Direct application of electrical – magnetic – wave – or... – Ion plating or implantation
Reexamination Certificate
2005-01-18
2005-01-18
Alejandro-Mulero, Luz (Department: 1763)
Coating processes
Direct application of electrical, magnetic, wave, or...
Ion plating or implantation
C438S766000
Reexamination Certificate
active
06844031
ABSTRACT:
A single, or common, ion beam source is utilized for ion beam deposition (IBD) of defect-free multilayer coatings, e.g., multilayer, carbon-based protective overcoats for magnetic and/or magneto-optical (MO) data recording/information storage and retrieval media such as hard disks. According to the inventive methodology, a plurality of source gas supply means for supplying a single IBD source with different source gases for each of the layers of the multilayer are selectively operated in “vent” and “run” modes by means of a plurality of valves, the opening and closing of which are determined by a programmable gas flow controller. The inventive method and apparatus advantageously provide IBD of multilayer coatings with minimum cross-contamination of individual layers, at a reduced equipment cost and size obtained by elimination of the need for separate ion beam sources and associated vacuum pump for each constituent layer of the multilayer.
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McLeod Paul Stephen
Shows Mark A.
Alejandro-Mulero Luz
McDermott Will & Emery LLP
Seagate Technology LLC
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