Method using x-rays to determine thickness of organic films

Details Method using x-rays to determine thickness of organic films Method using x-rays to determine thickness of organic films

1990-03-14

1991-03-26

Westin, Edward P.

X-ray or gamma ray systems or devices

Specific application

Diffraction, reflection, or scattering analysis

378 71, 378 89, 378 54, 378 55, G01N 2320, H05G 108, G01B 1502

Patent

active

050035690

ABSTRACT:
A thickness determination method for organic films comprises the steps of: irradiating an organic film to be measured with x-rays at a certain angle of incidence, finding an angle of reflection at which the x-ray intensity reaches a peak, and finding the thickness of the film from the angle of this peak.

REFERENCES:
patent: 2428796 (1947-10-01), Frideman
patent: 4426719 (1984-01-01), Fraenkel
patent: 4764945 (1988-08-01), Tadahiro

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