Method using cantilever to measure physical properties

Details Method using cantilever to measure physical properties Method using cantilever to measure physical properties

1996-12-03

1999-12-28

Raevis, Robert

Measuring and testing

Surface and cutting edge testing

Roughness

G01B 528

Patent

active

060065931

ABSTRACT:
A method of measuring physical properties using a cantilever comprises bringing a tip attached at one end of a cantilever into contact with a sample and causing a vibrational force of a frequency between 10 and 1000 times the fundamental resonance frequency of the cantilever to act on the cantilever.

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G. Binnig, et al. "Atomic Force Microscope", Physical Review Letters, vol. 56, No. 9, (pp. 930-933), Mar. 3, 1986.
Kazushi Yamanaka, et al. "Ultrasonic Force Microscopy for Nanometer Resolution Subsurface Imaging", Appl. Phys. Lett., vol. 64, No. 2, (pp. 178-180), Jan. 10, 1994.
U. Rabe, et al. "Atomic Force Microscopy at MHz Frequencies", Ann. Physik 3, (pp. 589-598), Jul. 22, 1994.
M. Radmacher, et al. "Imaging Viscoelasticity by Force Modulation with the Atomic Force Microscope", Biophysical Journal, vol. 64, (pp. 735-742), Mar. 1993.

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