Method to reduce the height of the bird's head in oxide isolated

Details Method to reduce the height of the bird's head in oxide isolated Method to reduce the height of the bird's head in oxide isolated

1984-03-12

1986-09-23

Hearn, Brian E.

Metal working

Method of mechanical manufacture

Assembling or joining

29580, 29583, H01L 2194, H01L 2195

Patent

active

046127011

ABSTRACT:
The bird's heads of a local oxidation process are minimized by performing a polishing or grinding step to reduce the height of the bird's head down to a plane using the oxide inhibiting mask of the local oxidation process as a polishing stop.

REFERENCES:
patent: 3386865 (1968-06-01), Doo
patent: 3900350 (1975-08-01), Appels et al.
patent: 3961999 (1976-06-01), Antipov
patent: 4002511 (1977-01-01), Magdo et al.
patent: 4039359 (1977-08-01), Nakamoto
patent: 4088516 (1978-05-01), Kondo et al.
patent: 4532701 (1985-08-01), Kameyama et al.
patent: 4539744 (1985-09-01), Burton
Ghondi, VLSI Fabrication Principles Silicon and Gallium Arsenide, John Wiley and Sons, New York, 1983, pp. 576-583.

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