Method to reduce die edge shorting on pressure sensors using...

Details Method to reduce die edge shorting on pressure sensors using... Method to reduce die edge shorting on pressure sensors using...

2008-03-18

2008-03-18

Allen, Andre J. (Department: 2855)

Measuring and testing

Fluid pressure gauge

Mounting and connection

C438S479000

Reexamination Certificate

active

11453509

ABSTRACT:
A pressure sensor includes a sensing element fabricated on an N-type epitaxial layer grown on a P-type substrate, a P-type isolation region located around the edge of the sensing element die and in contact with the P-type substrate, and a conductive elastomeric seal engaging the P-type isolation region prevents shorting of the conductive elastomeric seal with the N-type epitaxial layer of the sensing element die. A method of making a pressure sensor comprises growing an n-type epitaxy layer on a p-type substrate wafer, resulting in a pressure sensor die and substrate having an edge, obtaining a mask adapted for fabricating an isolation diffusion layer around the edge using P-type material, and creating an isolation layer diffusion using P-type doping material around the edge using the mask. A conductive elastomeric seal can then be placed over the sensor die to make electrical contact to the package.

REFERENCES:
patent: 5184107 (1993-02-01), Maurer
patent: 6826966 (2004-12-01), Karbassi et al.
patent: 7129525 (2006-10-01), Uematsu et al.

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