Method to produce stress-free optical waveguides to reduce...

Details Method to produce stress-free optical waveguides to reduce... Method to produce stress-free optical waveguides to reduce...

2005-04-26

2005-04-26

Healy, Brian (Department: 2883)

Optical waveguides

Planar optical waveguide

C385S130000, C385S131000, C385S132000

Reexamination Certificate

active

06885803

ABSTRACT:
A method of forming a waveguide comprising the following steps. A structure is provided. An underclad layer is formed over the structure and a core layer is formed over the underclad layer. Patterning: the core layer to form the waveguide; and partially into the underclad layer, forming an overetched underclad layer having a projection underneath the waveguide. The waveguide having stress gradients and the overetched underclad layer having stress gradients.

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“Single and Multilayer Waveguides and Fabrication Process”, Filed Jan. 22, 2001.
“High Precision Alignment of Optical Waveguide Features,” Filed Dec. 13, 2000.

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