Method to produce a display screen with a matrix of transistors

Details Method to produce a display screen with a matrix of transistors Method to produce a display screen with a matrix of transistors

1991-09-19

1993-09-07

LaRoche, Eugene R.

Electric lamp and discharge devices: systems

Plural power supplies

Plural cathode and/or anode load device

359 55, 359 59, 345205, 345211, G02K 1133

Patent

active

052432602

ABSTRACT:
Method for producing a display screen with a matrix of transistors provided with an optical mask. This method consists of depositing on a substrate (100) a layer of black polyimide (102) absorbing the visible light and followed by a layer of photosensitive resin, of insolating the resin through a mask masking the channels of the transistors to be embodied, of eliminating the zones insolated with the resin and the sub-adjacent zones of the polyimide, of depositing an ITO layer (106) on the unit, of eliminating the rest of the resin and the ITO surmounting said resin so as to form the drains/sources of the transistors, of successively depositing a layer of hydrogenated amorphous silicon (110), a layer of silicon nitride (112) and a layer of aluminium (114), then of photoengraving the stack of these layers so as to form the gate of the transistors, and finally to render passive the unit with a layer of silicon (116).

REFERENCES:
patent: 4704559 (1987-11-01), Sugimoya et al.
patent: 4902638 (1990-02-01), Muto
patent: 4907861 (1990-03-01), Muto
patent: 5028122 (1991-07-01), Hamada et al.
patent: 5040875 (1991-08-01), Noguchi
patent: 5066106 (1991-11-01), Sakamoto et al.
patent: 5087113 (1992-02-01), Sakono et al.

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