Method to prevent adhesion of micromechanical structures

Details Method to prevent adhesion of micromechanical structures Method to prevent adhesion of micromechanical structures

1995-01-27

1997-08-19

Ryan, Patrick

Stock material or miscellaneous articles

Pile or nap type surface or component

Edge feature or configured or discontinuous surface

428688, 428220, 428192, 428702, 32420713, 324248, 324262, 73651, B32B 302, B32B 900, G01B 714, G01D 2100

Patent

active

056586361

ABSTRACT:
A method is provided for inhibiting stiction of suspended microstructures during post-release-etch rinsing and drying. The microstructures are shaped to include additional convex corners at regions of the released portion of the microstructure that can undergo substantial displacement toward the substrate. A stiction-inhibition method also includes incorporating clefts between the microstructure and adjacent field regions at regions of the microstructure which cannot undergo substantial displacement toward the substrate. Methods for inhibiting stiction are also provided wherein high-temperature rinse liquid is used and wherein a high-temperature anneal follows a rinsing step.

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