Method to observe film thickness and/or refractive index by colo

Details Method to observe film thickness and/or refractive index by colo Method to observe film thickness and/or refractive index by colo

1995-09-29

1997-03-11

Allen, Stephone

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

250225, 25055923, 25055927, 356381, 356369, G01N 2121, G01B 1106, G01J 350

Patent

active

056103921

ABSTRACT:
To observe film thickness and/or refractive index of a sample, light beams from a white light source are irradiated onto the surface of the solid or liquid sample such that the reflected light beams are colored by partial extinction of the reflected light beams. A difference 17 film thickness and/or refractive index of the sample is observed according to color difference of the reflected light beams.

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