Method to maximize capacity in IC fabrication

Data processing: financial – business practice – management – or co – Automated electrical financial or business practice or... – Operations research or analysis

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705 8, 706 19, 36446801, 36446828, G06F 1760

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active

059501707

ABSTRACT:
A method to maximize throughput of a group of multi-process machines whereby the number of each kind machine is determined. Then, the machine assignment of each machine is assigned a variable. Next, the throughput definition for each machine is calculated from a database of past production runs. Next, the capacity of each process is calculated. Then, the constraints of the machine assignment variables are determined. A linear programming model is then derived for the system. The linear programming model is then executed under the constraints to determine optimal machine assignments to maximize the capacity of the minimum capacity process.

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Optimisation of empirical model for IC fabrication process using linear programming. By Spervak D.; Ferguson, R.S.; Walton, A.J.; Newsam, M.I., IEE Electronic Library. Science, Measurement and Technology, IEE Proceedings--pp. 58-60, Mar. 1998.

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