Dynamic magnetic information storage or retrieval – Head – Core
Reexamination Certificate
2011-07-12
2011-07-12
Davis, David D (Department: 2627)
Dynamic magnetic information storage or retrieval
Head
Core
C029S603070
Reexamination Certificate
active
07978431
ABSTRACT:
A perpendicular magnetic recording (PMR) head is fabricated with a pole tip shielded laterally by a separated pair of bottom side shields and shielded from above by an upper shield. The bottom side shields surround a lower portion of the pole tip while the upper portion of the pole tip is surrounded by non-magnetic layers. The bottom shields and the non-magnetic layer form wedge-shaped trench in which the pole tip is formed by a self-aligned plating process. The wedge shape is formed by a RIE process using specific gases applied through a masking layer formed of material that has a slower etch rate than the non-magnetic material or the shield material. A masking layer of Ta, Ru/Ta, TaN or Ti, formed on a non-magnetic layer of alumina that is formed on a shield layer of NiFe and using RIE gases of CH3OH, CO or NH3or their combinations, produces the desired result. A write gap layer and an upper shield is then formed above the side shields and pole. The resulting structure substantially eliminates track overwrite while maintaining good track definition.
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Guan Lijie
Han Cherng-Chyi
Li Min
Liu Fenglin
Ackerman Stephen B.
Davis David D
Headway Technologies Inc.
Saile Ackerman LLC
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