Metal working – Method of mechanical manufacture – Electrical device making
Patent
1991-03-20
1991-11-12
Hall, Carl E.
Metal working
Method of mechanical manufacture
Electrical device making
298901, 346140R, 437209, 437918, H01C 1700, B41J 205, G01D 1516
Patent
active
050636553
ABSTRACT:
A method to integrate thermal drop on demand ink jet devices and related pulse driver circuitry for chips used in thermal ink jet printers. This integrated printhead chip is made by first fabricating on the substrate the driver pulse circuitry through the last level of metallization. Once complete, a low temperature (<400 C) CVD oxide is deposited and planarized. It is of sufficient thickness (3 to 4 microns) to insure a good thermal barrier between the pulse circuitry and the thermal inkjet devices. After planarization, the resistor material is deposited and patterned. Openings are then patterned to the inputs and outputs of the pulse driver circuitry. Aluminum copper metallurgy is deposited and patterned to connect the resistor to the pulse driver output and define the heater resistor areas. Inorganic and organic barrier layers are applied and patterned to protect the resistor material and interconnecting metallurgy from the corrosive effects of the ink. After testing, ink holes are drilled and the wafer is diced and nozzle plates are attached to the chips. Thus, this "on chip" driver integration enables the pulse driver circuitry to be moved to the thermal ink jet printhead. It offers advantages over other methods of ink jet/driver device integration by the chip footprint the same without decreasing the dimensions of the respective devices.
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Kachmarik Richard
Lamey Patrick
Hall Carl E.
International Business Machines Corp.
LaBaw Jeffrey S.
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