Photocopying – Projection printing and copying cameras – Methods
Reexamination Certificate
2006-05-23
2006-05-23
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
Methods
C355S053000
Reexamination Certificate
active
07050156
ABSTRACT:
A lithography system and method are used to increase throughput using multiple reticles to pattern multiple substrates that are positioned with respect to one another according to a predetermined sequence. For example, during a first exposure period a first reticle patterns a first set of substrates, during a second exposure period a second reticle patterns a second set of substrates, during a third exposure period the first reticle patterns a third set of substrates, etc., until all desired substrates are patterned. It is to be appreciate that after the first and second reticles are complete, third and fourth reticles can pattern the first, second, third, etc. sets of substrates.
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de Klerk Jos
Galburt Daniel N.
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