Method to increase mechanical fracture robustness of porous...

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum

Reexamination Certificate

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C438S624000, C257SE21576

Reexamination Certificate

active

07342315

ABSTRACT:
The present invention provides an insulating layer100for an integrated circuit110comprising a porous silicon-based dielectric layer120located over a substrate130. The insulating layer comprises a densified layer140comprising an uppermost portion142of the porous silicon-based dielectric layer.

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patent: 6593653 (2003-07-01), Sundararajan et al.
patent: 6787446 (2004-09-01), Enomoto et al.
patent: 2003/0111263 (2003-06-01), Fornof et al.
patent: 2005/0064699 (2005-03-01), Kondo et al.

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