Optics: measuring and testing – For light transmission or absorption
Reexamination Certificate
2005-07-12
2005-07-12
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
For light transmission or absorption
C356S436000, C356S437000
Reexamination Certificate
active
06917430
ABSTRACT:
A method and control system for controlling the delivery of a source chemical by a carrier gas. The carrier gas is delivered to a vessel containing the source chemical, and a flow of source chemical and carrier gas is carried from the vessel along a flow line. A sensor is used to detect light absorption of the flow, and the flow is adjusted based on what is detected. The sensor provides that light is directed transversely through the flow line and that the intensity of the light which passes through the flow line is detected by a detector. The detector forwards an output signal to a signal processing unit which thereafter adjusts the flow based on what was detected. The light may be filtered. The flow line includes at least a portion which provides an optical window for allowing light to pass therethrough.
REFERENCES:
patent: 4692621 (1987-09-01), Passaro et al.
Berman Michael
Gould Scott
LSI Logic Corporation
Merlino Amanda
Toatley , Jr. Gregory J.
Trexler Bushnell Giangiorgi & Blackstone Ltd.
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