Method to improve the control of electro-polishing by use of...

Electrolysis: processes – compositions used therein – and methods – Electrolytic erosion of a workpiece for shape or surface... – With measuring – testing – or sensing

Reexamination Certificate

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C205S672000, C205S673000, C204S229900, C204S234000, C204S275100

Reexamination Certificate

active

07067048

ABSTRACT:
A method and apparatus which uses a plating electrode in an electrolyte bath. The plating electrode works to purify an electrolyte polishing solution during the electro-polishing process. Preferably, the plating electrode is employed in a closed loop feedback system. The plating electrode may be powered by a power supply which is controlled by a controller. A sensor may be connected to the controller and the sensor may be configured to sense a characteristic (for example, but not limited to: resistance, conductance or optical transmission, absorption of light, etc.) of the electrolyte bath, which tends to indicate the level of saturation. Preferably, the plating electrode is easily replaceable.

REFERENCES:
patent: 5507923 (1996-04-01), Stouse et al.
patent: 6458262 (2002-10-01), Reid
patent: 6899804 (2005-05-01), Duboust et al.
patent: 2002/0153246 (2002-10-01), Wang
patent: 2003/0070918 (2003-04-01), Hanson

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