Electric lamp or space discharge component or device manufacturi – Process – With assembly or disassembly
Patent
1992-02-21
1992-09-29
Ramsey, Kenneth J.
Electric lamp or space discharge component or device manufacturi
Process
With assembly or disassembly
445 50, 313309, H01J 902
Patent
active
051510618
ABSTRACT:
The present invention develops a process wherein a method for fabrication of field emission tips for flat panel displays and in particular to the formation of an array of self-aligned emission cathode tips. The method forms self-aligned ultra-sharp cathode tips out of a conducting material by etching contacts into an insulator which encloses a grid of conducting lines which will serve as the anodes. Next, a film having poor step coverage is deposited into the contacts followed by a selective deposition of a conducting material thereby resulting in a cone shaped configuration. Then the film is etched selective to the cone followed by the sharpening of the cone tip by conventional methods, thereby resulting in an array of evenly-spaced self-aligned emission cathodes having ultra-sharp tips.
REFERENCES:
patent: 4498952 (1985-02-01), Christensen
patent: 4874981 (1989-10-01), Spindt
patent: 4923421 (1990-05-01), Brodie et al.
patent: 5100355 (1992-03-01), Marcus et al.
"Fabrication of Silicon Field Emission Points for Vacuum Microelectronics by Wet Chemical Etching", by Johann T. Trujillo et al., Semicond. Sci. Technol. 6 (1991), pp. 223-225.
"Oxidation Sharpening of Silicon Tips", by T. S. Ravi et al., J. Vac. Sci. Technol. B 9 (6), Nov./Dec. 1991.
Micro)n Technology, Inc.
Paul David J.
Ramsey Kenneth J.
LandOfFree
Method to form self-aligned tips for flat panel displays does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method to form self-aligned tips for flat panel displays, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method to form self-aligned tips for flat panel displays will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1965592