Semiconductor device manufacturing: process – Having selenium or tellurium elemental semiconductor component
Reexamination Certificate
2008-04-16
2011-10-04
Roman, Angel (Department: 2812)
Semiconductor device manufacturing: process
Having selenium or tellurium elemental semiconductor component
C438S095000, C257S003000, C257SE47001, C257SE47005, C257SE21068
Reexamination Certificate
active
08030128
ABSTRACT:
Embodiments of the present invention provide a method that includes providing a substrate including an emitter layer comprising a plurality of emitters, each emitter defining an axis, forming a heater layer above the emitter layer, and forming a phase change memory (PCM) cell layer above the heater layer. The method also includes forming a top contact layer above the PCM cell layer. The top contact layer comprises a plurality of top contacts, where each top contact is located between two axes. Other embodiments are also described.
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Chang Runzi
Lee Peter
Lee Winston
Sutardja Pantas
Wei Chien-Chuan
Marvell International Ltd.
Roman Angel
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