Method to form a protected metal fuse

Details Method to form a protected metal fuse Method to form a protected metal fuse

1998-06-18

2000-08-08

Nguyen, Tuan H.

Semiconductor device manufacturing: process

Making device array and selectively interconnecting

438132, 438601, H01L 2182

Patent

active

061001163

ABSTRACT:
A method for forming protection layers completely around a metal fuse to protect the metal fuse 74A and metal lines 74B from moisture corrosion from fuse opening and micro-cracks in dielectric layers. The invention surrounds the fuse on all sides with two protection layers: a bottom protection layer 70 and a top protection layer 78. The top protection layer 78 is formed over the fuse metal, the sidewalls of the metal fuse and the bottom protection layer 70. The protection layers 70 78 of the invention form a moisture proof seal structure around the metal fuse 74A and protect the metal fuse 74A and metal lines 74B from moisture and contaminates.

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