Metal working – Method of mechanical manufacture – Electrical device making
Reexamination Certificate
2005-05-10
2009-08-18
Tugbang, A. Dexter (Department: 3729)
Metal working
Method of mechanical manufacture
Electrical device making
C029S603120, C029S603150, C216S040000, C216S042000, C360S324200
Reexamination Certificate
active
07574791
ABSTRACT:
A method for fabricating magnetic side shields for an MR sensor of a magnetic head. Following the deposition of MR sensor layers, a first DLC layer is deposited. Milling mask layers are then deposited, and outer portions of the milling mask layers are removed such that a remaining central portion of the milling mask layers is formed having straight sidewalls and no undercuts. Outer portions of the sensor layers are then removed such that a relatively thick remaining central portion of the milling mask resides above the remaining sensor layers. A thin electrical insulation layer is deposited, followed by the deposition of magnetic side shields. A second DLC layer is deposited and the remaining mask layers are then removed utilizing a chemical mechanical polishing (CMP) liftoff step. Thereafter, the first DLC layer and the second DLC layer are removed and a second magnetic shield layer is then fabricated thereabove.
REFERENCES:
patent: 6052261 (2000-04-01), Watanabe et al.
patent: 6317300 (2001-11-01), Sasaki et al.
patent: 6489216 (2002-12-01), Shiu et al.
patent: 6525905 (2003-02-01), Susaki
patent: 6553649 (2003-04-01), Santini
patent: 6665152 (2003-12-01), Nemoto
patent: 2004/0085684 (2004-05-01), Basra et al.
patent: 2004/0105196 (2004-06-01), Kataoka
patent: 11-66520 (1999-03-01), None
Araki Satoru
Beach Robert Stanley
Cyrille Marie-Claire
Jayasekara Wipul Pemsiri
Le Quang
Hitachi Global Storage Technologies - Netherlands B.V.
Tugbang A. Dexter
Zilka-Kotab, PC
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