Semiconductor device manufacturing: process – Having organic semiconductive component
Reexamination Certificate
2007-12-18
2007-12-18
Geyer, Scott B. (Department: 2812)
Semiconductor device manufacturing: process
Having organic semiconductive component
C438S048000, C438S049000, C438S200000
Reexamination Certificate
active
11115814
ABSTRACT:
A method of fabricating a nanowire CHEMFET sensor mechanism includes preparing a silicon substrate; depositing a polycrystalline ZnO seed layer on the silicon substrate; patterning and etching the polycrystalline ZnO seed layer; depositing an insulating layer over the polycrystalline ZnO seed layer and the silicon substrate; patterning and etching the insulating layer to form contact holes to a source region and a drain region; metallizing the contact holes to form contacts for the source region and the drain region; depositing a passivation dielectric layer over the insulating layer and the contacts; patterning the passivation layer and etching to expose the polycrystalline ZnO seed layer between the source region and the drain region; and growing ZnO nanostructures on the exposed ZnO seed layer to form a ZnO nanostructure CHEMFET sensor device.
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Conley, Jr. John F.
Ono Yoshi
Stecker Lisa H.
Geyer Scott B.
Law Office of Gerald Maliszewski
Maliszewski Gerald
Nikmanesh Seahvosh
Sharp Laboratories of America Inc.
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