Semiconductor device manufacturing: process – Having biomaterial component or integrated with living organism
Reexamination Certificate
2011-04-19
2011-04-19
Mulpuri, Savitri (Department: 2812)
Semiconductor device manufacturing: process
Having biomaterial component or integrated with living organism
C257SE21409, C438S049000, C438S142000
Reexamination Certificate
active
07927888
ABSTRACT:
Improved method to fabricate a microelectronic device provided with at least one circuit to detect biological elements, comprising the steps of:a) forming transistors,depositing at least one layer in at least one insulating material (141) coating said transistors,forming one or more holes (143) in said layer of insulating material (141), so as to expose the upper face of the respective gate (135) of first-type transistors,filling the holes with a gate material,b) removing, at least in part, the respective gate (135) of the first-type transistors, whilst the gate of second-type transistors is protected, the method prior to or at the same time as said removal conducted at step b) further comprising the removal of said gate material.
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Billoint Olivier
Buckley Julien
Delapierre Guillaume
Commissariat a l''Energie Atomique
Mulpuri Savitri
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
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