Method to determine tool paths for thinning and correcting error

Details Method to determine tool paths for thinning and correcting error Method to determine tool paths for thinning and correcting error

1991-12-13

1994-03-01

Smith, Jerry

Boots, shoes, and leggings

156626, 156643, G06F 1546

Patent

active

052914151

ABSTRACT:
A method to determine the tool path of a material removal tool which is part of a system to shape the surface of a substrate is disclosed. The method conditions initial metrology data of the substrate into a dwell time versus position on the surface for the removal tool. The dwell time array is subsequently converted into a velocity versus position array so that a position controller means may be utilized to guide the movement of the substrate with respect to the removal tool to perform precise material removal on the surface of the substrate.

REFERENCES:
patent: 4618262 (1986-10-01), Maydan et al.
patent: 4758304 (1988-07-01), McNeil et al.
patent: 4860229 (1989-08-01), Abbe et al.
patent: 4877479 (1989-10-01), McNeil et al.
patent: 4915757 (1990-04-01), Rando
patent: 4928257 (1990-05-01), Yerkes et al.
patent: 4931982 (1990-06-01), Hayashida
Solid State Technology, vol. 34, No. 9, Sep. 1991; pp. 57-59, "Film Thickness Mapping System".

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