Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
Patent
1995-04-11
1997-06-10
Allen, Stephone
Radiant energy
Photocells; circuits and apparatus
Optical or pre-photocell system
356343, 2502222, G01N 1506
Patent
active
056378815
ABSTRACT:
A structure and a method provide a quasi bright field particle sensor for the detection of non-spherical particles, using a laser beam of predetermined polarization. A phase shift caused by non-spherical particles passing through the laser beam is utilized to detect the presence of such particles. In one embodiment, a single laser beam is used to detect the concentration of non-spherical particles in the pump line receiving the exhaust gas from a process chamber.
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Aqui Derek
Borden Peter
Burghard Raymond
Allen Stephone
High Yield Technology, Inc.
Kwok Edward C.
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