Gas separation: processes – With control responsive to sensed condition – Concentration sensed
Patent
1997-07-25
1999-03-16
Smith, Duane S.
Gas separation: processes
With control responsive to sensed condition
Concentration sensed
553852, 95226, 96351, 96413, 96417, B01D 4702
Patent
active
058823786
ABSTRACT:
A process to detect metal impurities in a gas or gas mixture including the steps of directing the gas or gas mixture through non-metallic pipings to a sampling device and sampling the gas or gas mixture for metal impurities detection, wherein the sampling device is close to an inlet and/or outlet of a machine employing the gas or gas mixture as a processing gas, the machine being surrounded by a booth containing a gaseous atmosphere which is continuously circulated in the booth, partially renewing said atmosphere continuously, and exhausting excess atmosphere.
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"A new technique for gettting oxgen and moisture from gases used in semiconductor processing" Apl. Phys. Left. vol. 41, Issue I pp. 88-89, Jul. 1982.
Suzuki Itsuko
Tarutani Kohei
L'Air Liquide Societe Anonyme pour L'Etude et L'Exploitation des
Smith Duane S.
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