Method to control the thickness of an antireflection coating and

Details Method to control the thickness of an antireflection coating and Method to control the thickness of an antireflection coating and

1990-06-28

1991-06-18

Bueker, Richard

Coating processes

Measuring, testing, or indicating

Thickness or uniformity of thickness determined

437 8, 118708, 118712, 118715, 427162, 4272481, 427 2, C23C 1454

Patent

active

050248537

ABSTRACT:
Method to control the thickness of an antireflection coating.
According to the invention, the semi-conductive structure (14) is fed with a constant current (16) and the voltage (24) is measured at its terminals. This voltage passes through a maximum when the reflectivity of the antireflection coating passes through a minimum.
Application for the embodiment of semi-conductive lasers.

REFERENCES:
patent: 3846165 (1974-11-01), Ettenberg
Somani, Applied Optics, vol. 27, No. 8, Apr. 15, 1988, pp. 1391-1393.
Serenyi, Applied Optics, vol. 26, No. 5, Mar. 1, 1987, pp. 845-849.

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