Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2007-01-16
2009-11-03
SanMartin, Jaydi (Department: 2837)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C310S320000, C310S365000
Reexamination Certificate
active
07612488
ABSTRACT:
A piezoelectric resonator include a multi-layer top electrode. The multi-layer top electrode includes at least a top metal layer and a bottom metal layer. A top metal layer edge is recessed compared to a bottom metal layer edge allowing conformal deposition of a passivation layer. The passivation layer covers and protects the underlying layers from subsequent etching, thereby preventing etch undercut of the top electrode. In some embodiments, the multi-layer top electrode is configured as a bi-layer. In other embodiments, an extra layer is configured between the top metal layer and the bottom metal layer, for example a shunt load layer.
REFERENCES:
patent: 4692653 (1987-09-01), Kushida et al.
patent: 5589810 (1996-12-01), Fung
patent: 5692279 (1997-12-01), Mang et al.
patent: 5844347 (1998-12-01), Takayama et al.
patent: 6291931 (2001-09-01), Lakin
patent: 6307447 (2001-10-01), Barber et al.
patent: 6407649 (2002-06-01), Tikka et al.
patent: 6500678 (2002-12-01), Aggarwal et al.
patent: 6937114 (2005-08-01), Furukawa et al.
patent: 7148610 (2006-12-01), Jacot et al.
patent: 7220600 (2007-05-01), Summerfelt et al.
patent: 7276836 (2007-10-01), Umeda et al.
patent: 7466537 (2008-12-01), Nakayama
patent: 2004/0115881 (2004-06-01), Choi et al.
patent: 2005/0099100 (2005-05-01), Kita et al.
patent: 2006/0131990 (2006-06-01), Milsom et al.
patent: 2007/0152540 (2007-07-01), Fujii et al.
patent: 2008/0157632 (2008-07-01), Williams
patent: 2004-135163 (2004-04-01), None
Tapani Makkonen, Tuomas Pensala, Juha Vartiainen, Jouni V. Knuuttila, Jyrki Kaitila, Martti M. Salomaa, “Estimating Materials Parameters in Thin-Film BAW Resonators Using Measured Dispersion Curves,” Jan. 2004, pp. 42-51, IEEE, vol. 51., No. 1.
R. Aigner, J. Ella, H-J. Elbrecht, W. Nessler, S. Marksteiner, “Advancement of MEMS into RF-Filter Applications,”2002, pgs. 1-4, IEEE.
Kenneth M. Lakin, Gerald R. Klein, Kevin T. McCarron, “High-Q Microwave Acoustic Resonators and Filters,”Dec., 1993, pgs. 2139- 2146, IEEE Transaction on Microwave Theory and Techniques, vol. 41 No. 12.
K. M. Lakin, “Thin Film Resonators and High Frequency Filters,” Jun. 1, 2001, pgs, 1-18, TFR Technologies, Inc.
Bouche Guillaume
Wall Ralph N.
Haverstock & Owens LLP
Maxim Integrated Products Inc.
SanMartin Jaydi
LandOfFree
Method to control BAW resonator top electrode edge during... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method to control BAW resonator top electrode edge during..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method to control BAW resonator top electrode edge during... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4074808