Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper
Reexamination Certificate
2006-01-24
2006-01-24
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
Detailed holder for photosensitive paper
C355S053000, C355S075000
Reexamination Certificate
active
06989889
ABSTRACT:
A method, system, and apparatus for management of reaction loads in a lithography system is described. An isolated structure is supported by a non-isolated structure. The isolated structure supports a moveable stage. A linear motor includes a first linear motor element and a second linear motor element. The first linear motor element is coupled to the moveable stage. A plurality of parallel flexure plates mount the second linear motor element on the isolated structure. A flexure rod is coupled between the non-isolated structure and the second linear motor element.
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Copy of European Search Report for Application No. 03005312.8, mailed Sep. 9, 2003.
ASML Holding N.V.
Nguyen Henry Hung
Sterne Kessler Goldstein & Fox P.L.L.C.
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