Method relating to the manufacture of a semiconductor component

Details Method relating to the manufacture of a semiconductor component Method relating to the manufacture of a semiconductor component

1998-03-03

2000-10-31

Nguyen, Tuan H.

Semiconductor device manufacturing: process

Forming bipolar transistor by formation or alteration of...

438325, 438335, H01L 21331

Patent

active

061401943

ABSTRACT:
A manufacturing method for semiconductor components is disclosed which will allow better precision in the definition of the doped areas of the components and the separation of differently doped areas. A selectively shaped area of, for example, polysilicon, defining the area or areas to be doped, is deposited on the component before masks are applied. This makes the positioning of masks less critical because they only have to be positioned within the area of the polysilicon layer. In this way, an accuracy of 0.1 .mu.m or better can be achieved.

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