Method on manufacturing spin valve film

Details Method on manufacturing spin valve film Method on manufacturing spin valve film

2008-09-02

2008-09-02

Kim, Paul D (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S603090, C029S603130, C204S192150, C360S324110, C360S324120, C427S127000, C427S128000

Reexamination Certificate

active

11121929

ABSTRACT:
A method of manufacturing a spin valve film, produces a large read out signal. After a completion of a film making process for forming a previous film of two films to be formed successively, but before an initiation of a film making process for forming a succeeding film of the two films, a step of decreasing an anisotropic magnetic field of the spin valve film is introduced by interrupting a film making process. This step may be performed by keeping a substrate within a sputtering vacuum chamber. The interruption can be shortened by exposing the substrate to a plasma, transferring the substrate in a separate vacuum chamber is lower or whose H2O or O2concentration is higher than that in the sputtering vacuum chamber, conducting a surface treatment with a gas containing H2O or O2, or flowing a process gas.

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