Method of working flat articles

Details Method of working flat articles Method of working flat articles

1975-03-25

1977-03-01

Whitehead, Harold D.

Abrasive tool making process, material, or composition

Impregnating or coating an abrasive tool

51216LP, 51235, 51323, B24B 4100

Patent

active

040095401

ABSTRACT:
An article, for example a semiconductor wafer, is temporarily secured to a support without using a cement so that a treatment such as polishing may be carried out. The support has at least one recess and the article is positioned on the recess. The support with the article are then placed in a space in which sub-atmospheric pressure is produced so that gas escapes from the recess. When the sub-atmospheric pressure in the space is removed, the article closes the recess so that sub-atmospheric pressure is maintained there resulting in temporary adhesion of the article to the support.

REFERENCES:
patent: 2353066 (1944-07-01), Phillips
patent: 2443987 (1948-06-01), Morrison
patent: 2855653 (1958-10-01), Kastenbein
patent: 3004766 (1961-10-01), Bryant
patent: 3131476 (1964-05-01), Seher
patent: 3330714 (1967-07-01), Gunderson
patent: 3681139 (1972-08-01), Jannett
patent: 3740900 (1973-06-01), Youmans
patent: 3809050 (1974-05-01), Chough

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