Method of washing super precision devices, semiconductors, with

Details Method of washing super precision devices, semiconductors, with Method of washing super precision devices, semiconductors, with

1988-12-12

1992-01-07

Pal, Asok

Cleaning and liquid contact with solids

Processes

Miscellaneous

252DIG12, 25217412, 134 251, B08B 300

Patent

active

050788027

ABSTRACT:
Disclosed is a method of super precision devices such as semiconductor devices. In the method of the present invention, the devices are washed with an aqueous solution containing a purified proteolytic enzyme, poly(oligo)saccharide-decomposing enzyme, or a lipid or oil-decomposing enzyme.

REFERENCES:
patent: Re32672 (1988-05-01), Huth et al.
patent: 4690773 (1987-09-01), Ogumbiyl et al.
patent: 4736759 (1988-04-01), Coberly et al.
patent: 4749511 (1988-06-01), Lad et al.
patent: 4921630 (1990-05-01), Bhatia

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