Cleaning and liquid contact with solids – Processes – Miscellaneous
Patent
1996-02-06
1998-02-10
Soderquist, Arlen
Cleaning and liquid contact with solids
Processes
Miscellaneous
134 1, 134 11, 134 254, 134 30, 134 38, 134 40, B08B 304, B08B 700
Patent
active
057164584
ABSTRACT:
An azeotropic liquid mixture comprising a first component (isopropyl alcohol) and a second component (water) is charged in the washing tank. A heater and a liquid temperature sensor are used to heat the azeotropic liquid mixture in the washing tank to the azeotropic point of the mixture so as to generate a vapor phase mixture forming a vapor layer. A master mask, which is an article to be cleaned, is exposed to the vapor phase mixture in the vapor layer for washing. The vapor phase mixture used for washing is condensed into a condensate, which is removed out of the washing tank through a condensate pan. The master mask is pulled up out of the vapor layer for water-removing and drying.
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Nikon Corporation
Soderquist Arlen
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