Method of washing a polished object

Details Method of washing a polished object Method of washing a polished object

2006-06-26

2009-12-29

Webb, Gregory E (Department: 1796)

Cleaning and liquid contact with solids

Processes

Including application of electrical radiant or wave energy...

C134S002000, C134S003000, C510S175000

Reexamination Certificate

active

07637270

ABSTRACT:
An abrasive includes abrasive grains, a solvent, and an additive. MnO2, Mn2O3, Mn3O4, MnO or a mixture thereof as the abrasive grains, H2O2as the solvent, and HNO3, an organic acid, H2O2, etc., as the additive are employed. The abrasive is solidified with cooling, etc. The abrasive and the additive can be supplied to a polishing apparatus through separate routes.

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