Method of vaporizing multicomponent liquids

Details Method of vaporizing multicomponent liquids Method of vaporizing multicomponent liquids

1984-12-21

1987-02-10

Bashore, S. Leon

Distillation: processes, separatory

Distilling to separate or remove only water

203 1, 203 88, 203 91, 202205, 222456, 422 27, 422 28, B01D 342

Patent

active

046421653

ABSTRACT:
A method of vaporizing a multicomponent liquid, such as a hydrogen peroxide and water solution, for injection into a vacuum chamber including the steps of metering successive predetermined increments of the liquid at a predetermined rate onto a heated surface in a vaporization chamber. Upon exposure to the heated surface, each liquid increment is substantially instantaneously vaporized before the next succeeding liquid increment is metered onto the heated surface to produce a multicomponent vapor increment having substantially the same weight percent composition as the multicomponent liquid increment. Each vapor increment is passed into the vacuum chamber.

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