Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1978-11-24
1980-12-02
Hoffman, James R.
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
427 8, 427 431, C23C 1302
Patent
active
042371481
ABSTRACT:
Method for vaporizing alloys containing metals having different vapor pressures from elongated vaporizing crucibles which are fed with the alloy to be vaporized in rod form at several points along the length of the crucible. The alloy is vaporized by direct bombardment of the molten bath surface with electron beams periodically deflected according to a pattern for the deposition of the alloy coating material on a plurality of substrates positioned above the vaporizing crucible. The proportional composition of the alloy to be vaporized is regulated differently over the length of the crucible such that the alloy component with the lowest boiling point (or the highest vapor pressure) is in a smaller proportion in the alloy to be vaporized which is fed to the center of the vaporizing crucible than in the alloy fed to the ends of the vaporizing crucible.
REFERENCES:
patent: 3205087 (1965-09-01), Allen
patent: 3655430 (1972-04-01), Greaves
Aichert Hans
Hoffman Otto-Horst
Stephan Herbert
Hoffman James R.
Leybold-Heraeus GmbH
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